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Thin Film and Recrystallization
Papers by keyword «Thin Film» and «Recrystallization»
Annealing Textures of Thin Films and Copper Interconnects
Authors:
Dong Nyung Lee
Keywords:
Abnormal Grain Growth, Aluminium, Annealing, Chromium, Copper (Cu), Copper Interconnect, Fe-Ni Alloys, Nickel Ni, Ni-Co-P Alloys, Recrystallization, Silver, Texture, Thin Film
Next 10 Keywords
Finite Element Method (FEM)
(713 entries)
Diffusion
(702 entries)
Transmission Electron Microscopy (TEM)
(671 entries)
Al Alloy
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Grain Boundary
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Mechanical Alloying
(574 entries)
Sintering
(563 entries)
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(545 entries)
Oxidation
(543 entries)
Ceramics
(503 entries)
Total: 1 page; 1 paper
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