Papers by Author: Albert A. Burk

Abstract: High performance 15 kV n-GTOs were demonstrated for the first time in 4H-SiC. The device utilized a 140 μm thick, lightly doped n-type drift layer, with 1450°C lifetime enhancement oxidation, which resulted in a carrier lifetime of 17.5 μs. The p⁺ backside injector layer was thinned to minimize parasitic resistances. A room temperature forward voltage drop of 5.18 V was observed at a current density of 100A/cm². A 1 cm² device showed a leakage current of 0.17 μA at 15 kV. The 4H-SiC n-GTO showed latching characteristics, and showed a turn-off time of 170 ns in a resistive load switching setup, which represents about a factor of 45 improvement in turn-off speed over 4H-SiC p-GTOs with comparable voltage and current ratings.

Abstract: In this work, we report the results of industrial qualification tests run on medium voltage SiC MOSFETs rated for 3.3 kV/40 A and 10 kV/15 A. The JEDEC JESD47J.01 standard was used as a guideline to conduct HTRB (High Temperature, Reverse Bias), HTGB (High Temperature, Gate Bias), and TDDB (Time Dependent Dielectric Breakdown) tests. No devices were found to have failed the qualification tests, and long oxide lifetime was projected for constant operation under positive bias. This paper also reports for the first time the results of qualification testing of the MOSFET body diode on a large population of medium voltage SiC MOSFETs. Constant current stress at a current equal to the device forward rating was applied for 1000 hours. No degradation of any device parameter was observed for 3 lots of devices at both the 3.3 kV and 10 kV voltage rating.

Abstract: In this work, aggregate epitaxial carrot distributions are observed at the crystal, wafer and dislocation defect levels, instead of individual extended carrot defect level. From combining large volumes of data, carrots are observed when both threading screw dislocations (TSD) and basal plane dislocations (BPD) densities are locally high as seen in full wafer maps. Dislocation density distributions in areas of carrot formation are shown, and suggest TSD limit the formation of carrots in regions containing BPD. These data also add support for mechanisms requiring the need for both dissociated BPD and TSD for carrot formation.

Abstract: The impact of the lifetime enhancement process using high temperature thermal oxidation method on 4H-SiC P-GTOs was investigated. 15 kV 4H-SiC P-GTOs with 140 μm thick drift layers, with and without 1450°C lifetime enhancement oxidation (LEO) process, were compared. The LEO process increased the average carrier lifetime in p-type epi layer from 0.9 μs to 6.25 μs, and it was observed that the effectiveness of the lifetime enhancement process was very sensitive to the doping concentration. The device with the LEO process showed a significant reduction in forward voltage drop and a substantially lower holding current, as expected from the carrier lifetime measurements. However, a slight reduction in blocking capability was also observed from the devices treated with LEO process. The common emitter current gain (β) of the wide base test NPN BJT was approximately 10X higher for the wafer with LEO process.

Abstract: The growth of large diameter silicon carbide (SiC) crystals produced by the physical vapor transport (PVT) method is outlined. Methods to increase the crystal diameters, and to turn these large diameter crystals into substrates that are ready for the epitaxial growth of SiC or other non homogeneous epitaxial layers are discussed. We review the present status of 150 mm and 200 mm substrate quality at Cree, Inc. in terms of crystallinity, dislocation density as well as the final substrate surface quality.

Abstract: SiC wafer surface roughness is known to affect the electrical properties of certain power devices. As a result, inspection of the surface roughness can be a very important step for SiC device manufacturing processes. In this paper, we propose a newly fast surface roughness measurement method using Differential Interference Contrast (DIC) microscopy image. Results from this method were compared against white-light interference measurement system and a good correlation was confirmed. The comparison result confirmed that this method was a valid method to measure the surface roughness. This method enables users to inspect the surface roughness in 5 minutes (100mm wafer) and 10 minutes (150mm wafers), respectively.

Abstract: A family of planar MOSFETs with voltage ratings from 900 V to 15 kV are demonstrated. This family of planar MOSFETs represents Cree’s next generation MOSFET design and process, in which we continue to refine and evolve device design and processing to further shrink die sizes and enhance device performance. At voltage ratings of 3.3 kV and above, the specific on-resistance of the MOSFETs is approaching the theoretical limit. MOSFET switching performance in a clamped inductive switching circuit for the full range of voltage ratings is also demonstrated. Finally, improved threshold voltage and body diode stability under long-term stresses are presented.

Abstract: Basal plane dislocations (BPDs) introduced into SiC epitaxial layers, 25 μm thick, by the combination of implantation and activation anneal are directly observed by ultraviolet photoluminescence (UVPL) imaging. BPD loops appear to originate at micron-sized or smaller areas at the surface. These loops expand by gliding along the basal plane in the offcut direction until the loops approach the substrate. The loops can glide perpendicular to the offcut direction by many millimeters.

Abstract: Latest results are presented for SiC-epitaxial growths employing a novel 6x150-mm/10x100-mm Warm-Wall Planetary Vapor-Phase Epitaxial (VPE) Reactor. The increased throughput offered by this reactor and 150-mm diameter wafers, is intended to reduce the cost per unit area for SiC epitaxial layers, increasing the market penetration of already successful commercial SiC Schottky and MOSFET devices [1]. Increased growth rates of 30-40 micron/hr and short <2 hr fixed-cycle times (including rapid heat-up and cool-down ramps), while maintaining desirable epitaxial layer quality were achieved. Increased quantities of 150-mm epitaxial wafers now allow statistical analysis of their epitaxial layer properties. Specular epitaxial layer morphology was obtained, with morphological defect densities <0.4 cm^-2, consistent with projected 5x5 mm die yields averaging 93% for Si-face epitaxial layers between 10 and 30 microns thick. Intrawafer thickness and doping uniformity are good, averaging 1.7% and 5.1% respectively. Wafer-to-wafer doping variation has also been significantly reduced from ~12 [5] to <3% s/mean. Initial results for C-face growths show excellent morphology (97%) but poor doping uniformity (~16%). Wafer shape is relatively unchanged by epitaxial growth consistent with good epitaxial temperature uniformity.

Abstract: A 1 cm x 1 cm 4H-SiC N-IGBT exhibited a blocking voltage of 20.7 kV with a leakage current of 140 μA, which represents the highest blocking voltage reported from a semiconductor power switching device to this date. The device used a 160 μm thick drift layer and a 1 μm thick Field-Stop buffer layer, and showed a V_F of 6.4 V at an I_C of 20 A, and a differential R_on,sp of 28 mΩ-cm². Switching measurements with a supply voltage of 8 kV were performed, and a turn-off time of 1.1 μs and turn-off losses of 10.9 mJ were measured at 25°C, for a 8.4 mm x 8.4 mm device with 140 μm drift layer and 2 μm F-S buffer layer. The turn-off losses were reduced by approximately 50% by using a 5 μm F-S buffer layer. A 55 kW, 1.7 kV to 7 kV boost converter operating at 5 kHz was demonstrated using the 4H-SiC N-IGBT, and an efficiency value of 97.8% was reported.