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Papers by Author: C. Gabrielli

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Investigation of Dissolution and Electrodeposition of Copper in Concentrated and Diluted Oxalic Acid Media in Post-CMP Cleaning

Authors: C. Gabrielli, C. Mace, J. Matha, S. Mège, E. Ostermann, H. Perrot

Abstract: In the microelectronic industry using the damascene process, dendritic growth is observed on some parts of the circuits in critical conditions during the post-CMP cleaning step. To understand the electrochemical mechanism leading to this parasitic phenomenon copper behaviour in oxalic acid media was investigated by impedance measurement in both cathodic and anodic potential range and the dendritic growth conditions were studied.. Copper-oxalate complexes in the solution are taken into account.

287

Investigation of Chromate Layer Formation by Impedance Techniques

Authors: C. Gabrielli, Michel Keddam, F. Minouflet, K. Ogle, H. Perrot

573

Investigations of the Anodic Behaviour of Iron in Sulfuric Medium by the Electrochemical Quartz Crystal Microbalance under AC Regime

Authors: C. Gabrielli, Michel Keddam, F. Minouflet, H. Perrot

631

Investigation of the Electrochemical Noise Generated during the Stress Corrosion Cracking of a 42CD4 Steel Electrode

Authors: A. Benzaid, C. Gabrielli, F. Huet, M. Jerome, F. Wenger

167

Investigation of the Anodic Behavior of Aluminum in Weakly Acidic NaCL Solutions by AC Impedance and AC Quartz Electrogravimetry

Authors: S. Bourkane, C. Gabrielli, Michel Keddam, O. Haas, M. Mathias