Papers by Author: Chun Xu

Abstract: The diamond coatings were prepared by hot filament chemical vapor deposition(HFCVD) on the mono-crystalline silicon substrates. The influence of the technical parameters such as methane volume ratio, substrate temperature and reaction pressure on the residual stress in the diamond coating was studied. The results showed that the residual stress in the coating was compressive stress in the range of parameters studied, and too high or too low substrate temperature, chamber pressure and methane volume ratio would all increase the residual compressive stress. This relationship can be explained by the influence of amorphous carbon content, vacancy density and grain size on the residual stress.

Abstract: Diamond coatings were prepared on mono-crystalline silicon by hot filament chemical vapor deposition (HFCVD). Hardness, elastic modulus and other mechanical properties of the diamond were analyzed by nanoindenter. The results showed that the process parameters such as chamber pressure, substrate temperature, methane volume ratio have a greater impact on the mechanical properties of the diamond coating. The micro-hardness and elastic modulus of the coating would both decrease with too high or too low substrate temperature, chamber pressure or volume ratio of methane. The results showed that when the substrate temperature is 750°C, champer pressure is 2.5kPa and methane volume ratio is 2%, the diamond coatings have high micro-hardness and elastic modulus.