Papers by Author: Chung Po Lin

Abstract: A mechanical nanomanipulation system has been developed for the assembly and fabrication of nano-devices inside a scanning electron microscope (SEM). The mechanical manipulator is made up of commercially available actuators and positioning stages which consists of three individual operation units each having three linear stages and one rotational stage. Experiments were performed to construct 2D and 3D nanostructures with Au nanowires. Versatile manipulations including shape modification, length amendment, and connection of nanowires were carried out. An electron beam induced deposition (EBID) technique was used to grasp nano-materials and assemble them, enabling 2D and 3D manipulation to be easier to conduct. Experimental results show that this manipulator is possible to play an important role in enabling the technology of assembling nano-scale mechanical and electronic devices from prefabricated nano-scale components.

Abstract: With rapid expansion of nanotechnology, microminiaturization has become imperative in the field of micro/nano fabrication. A nanomanipulation system with high degrees of freedom that can perform nanomachining, nanofabrication and mechanical/electrical characterization of nanoscale objects inside a scanning electron microscope (SEM) is presented. The manipulation system consists of several individual operating units each having three linear stages and one rotational stage. The body of the manipulator is designed using the idea of superposition. Each operating unit can move in the permissible range of SEM’s vacuum chamber and can increase or decrease the number of units according to the requirement. Experiments were executed to investigate the in-situ electrical resistance of nano materials.