Papers by Author: D.M. Guo

Abstract: This study presents design of an ultra-precision wafer grinder which incorporates state-of-the-art automatic supervision and control system. The wafer grinder is characterized by wafer surface shape control, grinding forces and wafer thickness monitoring systems. The design provides a totally integrated solution to the ultra-precision grinder that is capable of grinding silicon wafers with surface roughness Ra<3 nm and total thickness variation<2µm/300mm.

Abstract: A method is presented based on geometric-curvature characteristics in which a scanning path planning for laser bending of a straight tube into a curve tube in a two- and three-dimensional space. In a two-dimensional (plane) bending, the steel tube is divided into several segments according to the extreme point and inflection point of the desired shape of the tube, taking the extreme point as the initial place of the path planning, using different scanning space for every segment in order to identify the scanning paths. For a tube bending in a three-dimensional space, a projection decomposition method is used, where the three-dimensional is decomposed into two two-dimensions, and respective scanning path planning and process parameters are thus acquired. By combining the data in the two-dimensional planes, the three-dimensional scanning path plan was obtained. Finally, an experimental verification is carried out to bend straight tubes into a two-dimensional sinusoidal and a three-dimensional helical coil-shaped tube. The results show that the proposed method of scanning path planning is effective and feasible.

Abstract: Laser cladding of micro-fluidic channels mold was performed using Nd:YAG laser and synchronous powder feeder. Influences of laser power and powder feed rate on clad layer geometrical dimensions and qualities were investigated. Results show that powder feed rate 1.5-2.5 g/min used obtains micro clad layers which meet geometrical dimensions’ requirement of micro-fluidic channels mold and combination of parameters laser power 400 W and powder feed rate 2.0 g/min achieves micro clad layer with better clad quality. Scanning paths of micro-fluidic channels mold was planned through CAD-CAM software. Using optimum parameters combination, multilayer laser cladding experiment was carried out and a sample of micro-fluidic channels mold was fabricated with expectative structure and hardness. A little milling and polishing makes the sample meet technical requirements, 0.2mm in height and 0.3mm in width. Fabricating a mold takes 15-20 min totally.