Papers by Author: De En

Abstract: The optical waveguides are produced in LiNbO3 substrate of three-component acceleration seismic geophone by lithography. Three-component acceleration seismic geophone detects changes in the external acceleration by detecting phase changes in the optical waveguides. The performance of optical waveguide directly affects the performance of three-component acceleration seismic geophone. Therefore, it is critical to measure and reduce the transmission loss of waveguides. The advantages and disadvantages of LiNbO3 crystal are introduced. The production process of Ti:LiNbO3 optical waveguide and its performance are presented. Some information about the types of transmission loss of optical waveguide and the measurement methods of optical waveguide loss are provided.

Abstract: Micro-Opto-Electro-Mechanical System (MOEMS) has the advantages of small size, light weight, little energy consumption, high reliability, high-volume production and so on. Micro-sensor is a new generation of sensor being developed, improved and expanded, and it will have a huge effect on the measurement area of still adopted traditional sensors. The characteristics and MOEMS manufacturing technologies are introduced. The concept and advantages of micro-sensors are described. The working principle of micro-accelerometer is analyzed.Micro-accelerometer will play an increasingly key role in the new monitoring and control equipments.Pole coupling is the key issue of micro-accelerometer to be resolved, but the rapid developing signal processing technology can provide new solutions to it.