Papers by Author: Fuh Liang Wen

Abstract: Through the estimated method for constraint-tuning modified-mode (CTMM), an innovative thin-disc piezoelectric ultrasonic actuator is used to drive an optical sled in this study. With four screws positioned on the thin-disc actuator at the angle distribution of 0⁰, 90⁰, 180⁰, and 320⁰, both modified modes of ((1, 2))_C and ((1, 1))_S in vibration provide an approximate equilibrium force to push an optical sled in bilateral movement. The innovative ultrasonic actuator has the vibrator’s compact and thinner structure, a thickness of 3 millimeters, without a gearbox rather than a conventional DC sled motor. Using contact friction to drive an optical sled with quick tracking in bilateral motion, experimental results demonstrate obtaining the desired function by a proposed single-phase, bi-frequency LC resonant driving circuit as well as remaining the original sled controller. The general specification of linear speed achieves 200－300 mm/s at less power dissipation for pushing the CD652A BenQ sled drive with 1.0 N output force and 20%－33% efficiency.

Abstract: The design and process of diaphragms for a welded bellow was studied in this paper, which is a flexible component in a piping system or vacuum equipment. Due to a lot of interactive effects on each procedure in the manufacturing for a welded bellow, furthermore the commercial FEM software ANSYS was used to construct a 3-dimension model for the displacement and modal analysis of bellows in which extensions and natural frequencies as well as mode shapes could be observed. The mechanical feature should be considered at the practical applications, i.e., to avoid the occurrence of resonant phenomena corresponding to pump operations and fluid delivery in a piping system. For the purpose of modeling validation, the axial tensile testing machine implemented the extension experiment for welded bellows. According to the results of simulation and experiment, the difference among them could be easily detected for the feature investigation for a design-oriented systemic analysis on the development of welded bellows.

Abstract: The various nitrogen gas (N₂) flows for depositing zirconium-nitride (ZrN) films on the substrate of a p-type (100) silicon wafer are investigated through reactive magnetron sputtering by a pulsed-DC power. The results, based on the design of experimental (DOE) method, indicate that the deposition effect of the ZrN_x film is obviously affected by various flow rates of nitrogen gas at the specific pulsing duty cycles. The crystal orientation of the zirconium-nitride film has a less order microstructure which is similar to an amorphous microstructure. Although the composition ratio of chemical elements is not identical in Zr and N, the surface roughness, grain size, and resistivity are the better feature. The deposition rate is inversely proportional to the nitrogen flow rate and the chamber pressure is also an important factor. The basic effect of N₂ flow rate on the surface roughness is rougher when more nitrogen gas is supplied. The resistivity of ZrN_x thin film has a positive relationship to N₂ flow rates at the reactive vacuum chamber.