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Papers by Author: I. Teerlinck

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VPD-DC-TXRF for Metallic Contamination Analysis of Ge Wafers

Authors: David Hellin, V. Geens, I. Teerlinck, Jan Van Steenbergen, Jens Rip, W. Laureyn, G. Raskin, Paul W. Mertens, Stefan De Gendt, Chris Vinckier

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A Study of the Influence of Typical Wet Chemical Treatments on the Germanium Wafer Surface

Authors: Bart Onsia, Thierry Conard, Stefan De Gendt, Marc Heyns, I. Hoflijk, Paul W. Mertens, Marc Meuris, G. Raskin, Sonja Sioncke, I. Teerlinck, Antoon Theuwis, Jan Van Steenbergen, Chris Vinckier

Pattern Dependent Corrosion Effects in HF Based Post Cu CMP Cleanings

Authors: Wim Fyen, I. Teerlinck, Sebastien Lagrange, S.H. Brongersma, A. Steegen, Paul W. Mertens, Marc Heyns

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