Papers by Author: Ille C. Gebeshuber

Abstract: This paper presents a simple process technique for the fabrication of valveless micro-pumps. The process design utilizes standard MEMS process using double-sided anisotropic silicon wet etching process with an additional adhesive bonding technique. The diffuser and nozzle element of the pump with depth of 50 µm, as well as a 150 µm thick silicon membrane are designed and fabricated using only 3 patterning process steps. A piezoelectric plate working at the frequency range from 0.1 kHz to 2 kHz is bonded on to the back side of the silicon membrane to create the membrane actuation. The patterning process of thick photoresist used as the adhesive layer for the substrate bonding is also discussed in detail. The fluid flow is observed and the process reproducibility is proven which show a good prospect for the future development of miniaturized valveless pump for biomedical application.

Abstract: A novel way to describe the complexity of biological and engineering approaches depending on the number of different base materials is proposed: Either many materials are used (material dominates) or few materials (form dominates) or just one material (structure dominates). The complexity of the approach (in biology as well as in engineering) increases with decreasing number of base materials. Biomimetics, i.e., technology transfer from biology to engineering, is especially promising in MEMS development because of the material constraints in both fields. The Biomimicry Innovation Method is applied here for the first time to identify naturally nanostructured rigid functional materials, and subsequently analyse their prospect in terms of inspiring MEMS development.

Abstract: Matter produced by organisms is remarkable. Evolutionary optimized properties, e.g. regarding hydrodynamic, aerodynamic, wetting and adhesive behavior, can already be found in the “simplest” forms of organisms. Euglena gracilis, a single-celled algal species, performs tasks as diverse as sensing the environment and reacting to it, converting and storing energy and metabolizing nutrients, living as a plant or an animal, depending on the environmental constraints. We developed a preparation method for atomic force microscopy investigation of dried whole Euglena cells in air and obtained data on whole cells as well as cell parts. Our studies corroborate TEM, SEM and optical microscopy results. Furthermore, we found new features on the pellicle, and set the ground for AFM force spectroscopy and viscoelastic studies on the nanoscale.