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CONFERENCE
6/16/2013 - 6/19/2013
The 7th International conference on Physical and Numerical Simulation of Materials Processing
5/16/2013 - 5/19/2013
2nd International Congress on Advanced Materials
4/13/2013 - 4/14/2013
2013 2nd lnternational Conference on lntclligent Materials, Applied Mechanics and Design Science (IMAMD 2013)
more...
Articles by author: Jose Ignacio Del Agua Borniquel
1 paper on 1 page:
1
Poly-Silicon Etch with Diluted Ammonia: Application to Replacement Gate Integration Scheme
Published in:
Ultra Clean Processing of Semiconductor Surfaces IX
(p207)
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