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Articles by author: Kun Tack Lee

• Advanced Cylindrical Capacitor Formation Using Gas-Phase Selective Etching
  Published in: Ultra Clean Processing of Silicon Surfaces VI (p203)
• An Exploration on the Bridge Formation Mechanism of Cylindrical Storage Poly-Silicon by Water Marks in High Performance 4Gigabit DRAM Capacitor
  Published in: Ultra Clean Processing of Silicon Surfaces V (p15)
• Development of a New TaN Etchant for Metal Gate
  Published in: Ultra Clean Processing of Semiconductor Surfaces VIII (p75)
• Low Si Recess on Cleaning Process by Dilute HF/SC-1 with Megasonic
  Published in: Ultra Clean Processing of Semiconductor Surfaces VIII (p209)
• Megasonics: A Cavitation Driven Process
  Published in: Ultra Clean Processing of Silicon Surfaces VII (p159)
• Prevention of Condensation Defects on Contact Patterns by Improving Rinse Process
  Published in: Ultra Clean Processing of Semiconductor Surfaces IX (p151)