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Papers by Author: Masami Naito

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Simulation Study of High-Speed Wafer Rotation Effects in a Vertical Reactor for 4H-SiC Epitaxial Growth on 150 mm Substrates

Authors: Masahiko Ito, Hiroaki Fujibayashi, Hideki Ito, Isaho Kamata, Masami Naito, Kazukuni Hara, Shoichi Yamauchi, Kunihiko Suzuki, Masayoshi Yajima, Shin Ichi Mitani, Katsumi Suzuki, Hirofumi Aoki, Koichi Nishikawa, Takahiro Kozawa, Hidekazu Tsuchida

Abstract: The effects of high-speed wafer rotation for 4H-SiC epitaxy in newly developed 150 mm vertical reactor is investigated by simulation analysis. The simulation model shows a good agreement with experimental results. It is revealed that a combination of high-speed wafer rotation as high as 1000 rpm and relatively high system pressure of 267 mbar is effective to reducing boundary layer thickness above the 4H-SiC wafer, and greatly enhances the epitaxial growth rates. The growth rate increase ~2 times using the combination of high-speed wafer rotation and relatively high system pressure.

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Analysis of Anionic Polymer Dispersant Behavior in Dense Silicon Nitride Suspensions with Oxide Additives by Using Colloidal Probe AFM

Authors: Hidehiro Kamiya, S. Matsui, Yusuke Fukuda, Masami Naito, T. Kakui

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Influence of Particle Size and Solid Loading on the Determination of the Isoelectric Point (IEP) of Ceramics Powders by Different Methods

Authors: W. Gelhoff, Masami Naito, R. Waesche, V. Hackley, Yuji Hotta

Structural Flaw Evaluation in Green Compacts and Ceramics by an Optical Method - For Understanding the Origin of Strength Variation in Ceramics -

Authors: Kazuyoshi Uematsu, Y. Zhang, Nozomu Uchida, Tadashi Hotta, Masami Naito, N. Shinohara, Masahiro Okumiya

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A Direct Examination of the Fracture Strength-Defect Size Relationship in Alumina Ceramics

Authors: Y. Zhang, Nozomu Uchida, Kazuyoshi Uematsu, Tadashi Hotta, K. Nakahira, Masami Naito

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