Papers by Author: Robert J. Hocken

Abstract: This abstract presents the development of an ultra-precision motion controlled positioning stage for nanometer positioning over a working volume of 50 mm × 50 mm × 4 µm at an accuracy of better than 10 nm that is traceable to the national standards. The positioning stage is designed to use various probing systems to perform “pick and place” manipulations and scanning of large specimens, including biological. The system is comprised of a two-axis, long-range stage and a 6 degree-of-freedom (DOF) short-range stage. The long-range stage is responsible for coarse motions of up to 50 mm, while the short-range stage is responsible for correcting positioning errors generated by the long-range stage to achieve nanometer level accuracies. The system will be housed in a vacuum chamber operating at a vacuum pressure of better than 10-3 Torr. The vacuum chamber is also designed to act as an environmental chamber where different gases can be used depending on the measurement task. The initial results of the fully developed positioning stage will be presented at the conference.

Abstract: Nanotechnology can be defined as “the study, development and processing of materials, devices, and systems in which structure on a dimension of less than 100 nm is essential to obtain the required functional performance.” There are currently two very different approaches to nanotechnology, the first and more classical approach is commonly called engineering nanotechnology. This approach involves using classical deterministic mechanical and electrical engineering principles to build structures with tolerances at levels approaching a nanometer. The other approach, sometimes called molecular nanotechnology, is concerned with self-assembled machines and the like and is far more speculative. At UNC Charlotte’s Center for Precision Metrology we have been working in engineering nanotechnology for more than a decade. We started with molecular manipulation with scanning probe microscopes in the late 1980s [1] and have continued to develop new measurement systems [2], nano-machining systems [3,4], and nano-positioning devices. One of the largest challenges is precision motion control of macroscopic stages. Currently we have three stages under development or modification. The first is the Sub Atomic Measuring Machine (SAMM) [5] which is being modified to provide picometer resolution; the second is the Multi-Scale Alignment and Positioning System (MAPS) initially to be used for nanoimprinting; the third is an Ultra-Precision Vacuum Stage [6], which is the subject of another paper in this conference. This paper will discuss the first two systems.