Papers by Author: S.L. Hsu

Abstract: The Co3Pt magnetic layer with thickness of 7~28 nm was deposited onto the Pt underlayer. The as-deposited Co3Pt/Pt double-layered films with or without a 5 nm Pt capped layer were annealed at temperatures between 275 and 375 °C in vacuum of 1 mTorr. The influences of process parameters on perpendicular magnetic properties of Co3Pt thin films were investigated. The Co3Pt film with perpendicular coercivity (Hc⊥) value of 3620 Oe and the perpendicular squareness (S⊥) of 0.7 could be achieved from the Co3Pt(18 nm)/Pt(100 nm) double-layered films by annealing at 300°C. Further added Tb30Co70 film on the Co3Pt/Pt double-layered film could greatly enhance the perpendicular magnetic properties of the film. The Hc⊥ and S⊥ of the Tb30Co70/Co3Pt/Pt film were as high as 6560 Oe and 0.88, respectively, which has significant potential to be applied in perpendicular magnetic recording media.

Abstract: Co3Pt films were deposited on Pt underlayers with various thicknesses by conventional sputtering in order to investigate the effect of Pt underlayers and annealing temperatures on their microstructure and the magnetic properties. From XRD and HRTEM analysises, as annealing at 300°C, a well epitaxial growth of Co3Pt (002) on Pt (111) underlayer that leads the film to present perpendicular magnetic anisotropy. However, Pt atoms in the Pt underlayer will diffuse seriously into Co3Pt layer as the annealing temperature is increased to 375°C that changes the compositions to approach equiatomic CoPt, and showing in-plane magnetic anisotropy with soft magnetic properties.