Papers by Author: S. Miyake

Abstract: To realize ultrahigh density recording in high precision using polycarbonate as a recording media, the nanometer-scale mechanical processing properties of polycarbonate and fluorocarbon plasma-treated polycarbonate were investigated using atomic force microscopy (AFM). The surface free energy of the polycarbonate specimen can be reduced by fluorocarbon plasma-treatment, resulting in processing force being reduced. Thus, nanometer-scale precise processing of polycarbonate can be realized. Lines and spaces with intervals minimized to 60 nm were performed on the fluorocarbon plasma-treated polycarbonate. Viscoelastic properties of the fluorinated polycarbonate were evaluated using AFM in force modulation mode. Fluorocarbon plasma treatment can reduce friction force of a polycarbonate sample and improve its wear resistance. Therefore, the friction durability corresponding to the reliability of data reproduction was markedly improved.

Abstract: Nanometer-scale protuberance and groove processing was performed on a silicon (Si) surface by diamond tip sliding using atomic force microscopy (AFM). The protuberances of 0-5 nm height were obtained the silicon surface by using the diamond tip of approximately 200 nm radius and the grooves of 0-2 nm depth were processed by the tip of about 50 nm radius. It was observed that both protuberance and groove were produced using the tip of about 100 nm radius. Indentation measurements show the hardness of processed parts was greater than that of unprocessed parts. Potassium hydroxide (KOH) solution etching was performed on the mechanochemically processed sample. The processed areas were prevented from etching due to the formation of a dense oxide layer. This may be because the processed parts were oxidized by tip sliding due to the effect of mechanochemical oxidation.