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Articles by author: Simon Y.M. Chooi

• Angled XPS Analysis of Low-k Dielectric Surfaces after Cleaning
  Published in: Ultra Clean Processing of Silicon Surfaces VII (p331)
• Cleaning after Contact Etching of Multi-Film Stack and Cobalt Disilicide: An XPS Study
  Published in: Ultra Clean Processing of Silicon Surfaces VI (p243)
• Occurrence of Arsenic-Based Defects and Techniques for Their Elimination
  Published in: Ultra Clean Processing of Silicon Surfaces VII (p87)
• Post Polysilicon Etch (Incorporating DUV Resist an BARC) Polymer Cleaning
  Published in: Ultra Clean Processing of Silicon Surfaces IV (p113)
• Wet Oxide Etching of Dual Gate Oxide for 0.13μm Technologies and Beyond: Interaction with Photoresist and Equipment
  Published in: Ultra Clean Processing of Silicon Surfaces VI (p85)