Papers by Author: Soo Chang Kang

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Reactive Ion Etching Process of 4H-SiC Using the CHF3/O2 Mixtures and a Post-O2 Plasma-Etching Process
Authors: Soo Chang Kang, Moo Whan Shin
949
Adhesion and Microstructure of Ni Contacts to 3C-SiC
Authors: Soo Chang Kang, Moo Whan Shin
993
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