Papers by Author: Takuya Tsuchikawa

Abstract: The (Ba0.6Sr0.4)TiO3 (BST) thin films were formed on a Pt bottom electrode/glazed-Al2O3 substrates by a chemical solution deposition (CSD) method. The BST films were annealed at temperatures between 600 and 800°C in a rapid thermal annealing (RTA) process and grown at each temperature with a random orientation. The grain size of the BST films enlarged and the electrical properties of the BST films improved as the annealing temperature rose. The grain size of the film annealed at 800°C enlarged to be 80 nm. The averaged surface roughness Ra was 2.927 nm, which resulted in a favorable degree of planarity. The dielectric constant and loss tangent of the film at 1 MHz were 403 and 0.049, respectively. The film also displayed a high degree of tunability, which was 58.3% (at 429 kV/cm). These results indicated that high-quality BST thin films could be formed on an extremely cheap glazed-Al2O3 substrates.

Abstract: (Ba,Sr)TiO3 (BST) thin films have been investigated because of significant interest in device applications of their nonlinear dielectric properties such as in frequency tunable devices. We have investigated frequency conversion devices using BST films as new nonlinear devices, such as frequency mixers and multipliers. In this paper, we report the evaluation of nonlinear properties of various capacitors, and the experimental equation of the properties and the equivalent circuit model for frequency converters were established. A frequency multiplier using the BST film capacitor was fabricated, and obvious third harmonic signals could be observed. A conversion efficiency of -20 dB was obtained with a low input power of 0.25 W. Analysis of the converter with an equivalent circuit was also carried out, and the calculated output voltage agreed well with the measured result. The model is expected to be used for the analysis and improvement of conversion devices.