HOME CONTACT My eBook

Username: Password:

> @scientific.net

Articles by author: Timo Müller

• Formation of Time-Dependent Haze on Silicon Wafers
  Published in: Ultra Clean Processing of Silicon Surfaces VI (p109)
• Impact of Hydrogen on Oxygen Precipitation and Gate Oxide Integrity after RTA Processing
  Published in: Gettering anf Defect Engineering in Semiconductor Technology IX (p127)
• Oxygen Precipitation in Nitrogen Doped CZ Silicon
  Published in: Gettering and Defect Engineering in Semiconductor Technology XI (p17)
• Precipitation Enhancement of "so Called" Defect-Free Czochralski Silicon Material
  Published in: Gettering and Defect Engineering in Semiconductor Technology XI (p11)
• Preparation and Characterization of Time Dependent Haze on Silicon Surfaces
  Published in: Ultra Clean Processing of Silicon Surfaces V (p115)
• Processing and Characterization of 300 mm Argon-Annealed Wafers
  Published in: Gettering and Defect Engineering in Semiconductor Technology X (p105)
• Study of Nitrogen Incorporation in 6H-SiC Single Crystals Grown by PVT
  Published in: Silicon Carbide and Related Materials - 1999 (p87)
• Two Paths of Oxide Precipitate Nucleation in Silicon
  Published in: Gettering and Defect Engineering in Semiconductor Technology XII (p293)