Papers by Author: Y.M. Liu

Abstract: A high sensitivity pressure sensing system with a fiber Bragg grating (FBG) using the transverse strain characteristic of a straight bourdon tube (SBT) is presented and demonstrated for the first time to our knowledge. The transverse strain of the SBT makes the FBG tensioned. The pressure can be determined by measuring the shift of the Bragg wavelength. The experimentally obtained results indicate that the shift of the Bragg wavelength changes linearly with the applied pressure and the sensitive coefficients of pressure are approximately 6.22x10-3MPa-1. This represents a sensitivity value approximately 9.66x10-3pm/Pa. The pressure sensing system shows little hysteresis error.

Abstract: The Young’s modulus of micromechanical silicon films is very different from bulk silicon structures. It is very meaningful to test Young’s modulus of micromechanical silicon films in related studies. Owing to its small and fragile characterstics, a suitable non-contact and nondestructive method is needed to test the Young’s modulus of micromechanical silicon films with plate-like and beamlike structures. Utilizing acoustic excitation and optical detection method based on theoretical analysis, a new resonant method is presented to determinate Young’s modulus of micromachined silicon films. By using this novel method, more accurate results have been achieved and the measuring error is 11%, better than the reported 14%.