Papers by Author: Yasutaka Horie

Abstract: Effects of simultaneous addition of SiO2 and gadrinium oxide on densification of SiC ceramics were examined, and relation between microstructure and their mechanical properties were discussed. Total 11wt% of Gd2O3 and SiO2 were mixed with fine -SiC powder. The weight of Gd2O3 in (Gd2O3 + SiO2) were set as 0, 20, 40, 60, 80 and 100%. The mixture was hot-pressed at 1950oC under 40 MPa applied pressure for 1 h. In the case of 40Gd2O3 and 80Gd2O3 compositions, the effect of sintering temperature from 1900 to 2000oC was also examined. The bulk density increased with increasing Gd2O3 content at the sintering temperature of 1950oC. Bending strength of the sintered bodies also improved with increasing Gd2O3 content generally, but at 40Gd2O3 composition, the maximum over ~800 MPa was observed. Young’s modulous, Vickers hardness and fracture toughness also increased with increasing Gd2O3 content. The distribution of grain boundary phase was not homogeneous. Evaporation of additives, mainly SiO2, caused non-homogeneous distribution of grain boundary phase between outside and inside of sintered bodies. High temperature bending strength of 80Gd2O3 specimen was superior than that of 40Gd2O3 specimen.

Abstract: We study for the effects of additional gas such as oxygen (O2) and hydrogen (H2) into SF6. When H2 gas was added to SF6, surface fluoride atomic concentration and surface roughness were lower than the other additional gases. Surface fluoride atomic concentration under this experiment was reduced from 28 at % to 6 at % by the H2 addition. In post-processing, the fluoride atomic concentration was succeeded in a large reduction by processing H2, O2 plasma and high temperature hydrogen annealing. In hydrogen annealing, surface fluoride atomic concentration could be suppressed to less than 3 at %. This is new result succeeded in reduction of surface fluoride species greatly by hydrogen processing.