Authors: Shuo Jen Lee, J.J. Lai, Yu Ming Lee, Chi Yuan Lee, K.T. Yang, C.W. Peng
Abstract: In this study, the parametric effects of the EMM process were studied by both numerical
simulation and experimental tests. The numerical simulation was performed using commercial
software, FEMLAB, to establish a multi-physics model which consists of electrical field,
convection and diffusion phenomena to simulate the parametric effects of pulse rate, pulse duty,
electrode gap and inflow velocity. From the simulated results, the relationship between parameters
and the distribution of metal removal could be established. Proper process variables were also
chosen to conduct the EMM experiments. After the experiments, the profile of the processed
rectangular slot was measured by a Keyence digital microscope. Comparing profile of the processed
rectangular slot with the profile of the cathode, the machining accuracy of EMM process could be
determined. It could also verify the efficacy of the multi-physics model for predicting machining
accuracy. From this study, the effects of parameters such as pulse rate, pulse duty, electrode gap and
inflow velocity are better understood. The simulation model could be employed as a predictive tool
to provide optimal parameters for better machining accuracy and process stability of the EMM
process.
891
Authors: Shuo Jen Lee, Yu Ming Lee, Chi Yuan Lee, J.J. Lai, K.T. Yang, F.H. Kuan
Abstract: Due to lack of desirable mechanical properties of silicon substrate; the current trend of
micro-fabrication technology is towards metallic materials. In this study, the electrochemical micromachining
(EMM) technology is developed to fabricate micro-scale flow channels on thin metallic
316L stainless steel plate. The cathode electrode, the tool, is the mirror image of flow channels. It
was produced by the MEMS and UV-LIGA technology and the size is 200μm in width and 500μm
in height for the intension to fabricate a serpentine flow channel of 200μm in both depth and width.
Because of the electrode size, the process control parameters and geometrical features surpassed
conventional and CMOS methods. The flow channels on 0.6mm thick SS 316L plates were
fabricated by EMM process within 30 seconds with effective area of 625mm2. The dimensions of
flow channel were varying from 1504m to 5004m in width and about 2004m in depth. The results
demonstrate the EMM technology produces good quality metallic flow channels efficiently.
885
Authors: Chi Yuan Lee, Shuo Jen Lee, Ching Liang Dai, Chi Lieh Hsieh, Yu Ming Lee
Abstract: The fuel cell has the potential to become an indispensable source of electric power.
However, some problems have not yet been resolved. Measuring the temperature and humidity
inside the fuel cells is currently difficult. Accordingly, in this study, micro sensors were fabricated
within the fuel cell, in which the temperature and humidity distributions were measured.
The substrate of the fuel cell was made of stainless steel (SS-304) and etching was employed to
fabricate the channel on the stainless steel substrate. Then micro-electro-mechanical-systems
(MEMS) technology was used to fabricate the array micro temperature and humidity sensors on the
rib of channel of stainless steel. The advantages of array micro temperature sensors are their small
volume, their high accuracy, their short response time, the simplicity of their fabrication, their mass
production and their ability to measure the temperature at a precise location more effectively than
the traditional thermocouple. The micro humidity sensors were made from gold and titanium as
down and up electrodes in the channel. The performance curve of the single cell was operating at
41.54 °C and gas flow rates of H2/O2 at 200/200ml/min. The max power density of the bipolar with
micro sensor was 56 mW/cm2.
861
Authors: Shuo Jen Lee, J.J. Lai, Yu Ming Lee, Chi Yuan Lee, K.T. Yang, C.W. Peng
Abstract: In this study, the parametric effects of the EMM process were studied by both numerical
simulation and experimental tests. The numerical simulation was performed using commercial
software, FEMLAB, to establish a multi-physics model which consists of electrical field,
convection and diffusion phenomena to simulate the parametric effects of pulse rate, pulse duty,
electrode gap and inflow velocity. From the simulated results, the relationship between parameters
and the distribution of metal removal could be established. Proper process variables were also
chosen to conduct the EMM experiments. After the experiments, the profile of the processed
rectangular slot was measured by a Keyence digital microscope. Comparing profile of the processed
rectangular slot with the profile of the cathode, the machining accuracy of EMM process could be
determined. It could also verify the goodness of the multi-physics model for predicting machining
accuracy. From this study, the effects of parameters such as pulse rate, pulse duty, electrode gap and
inflow velocity are better understood. The simulation model could be employed as a predictive tool
to provide optimal parameters for better machining accuracy and process stability of the EMM
process.
290
Authors: Shuo Jen Lee, J.J. Lai, Yu Ming Lee, Ming Der Ger, S.W. Cheng
Abstract: Passive film of stainless steels possesses good corrosion resistant property. However, the
passive film formed in nature is not uniform and the quality is not consistent. It is the major causes
for local corrosion. The pitting potential test is a traditional method to test local corrosion of
stainless steels. The local corrosion is usually induced by the break-down of the passive film.
Therefore, it can be utilized to evaluate the quality of the passive film. Also, because the pitting test
is quick and inexpensive, many tests can be performed to evaluate the uniformity of the passive
film. This study focuses on SS316 stainless steel. The specimens were treated with electropolishing
processes. The original and the processed specimens were tested by pitting potential tests. From
these results, the distribution and the uniformity of passive film could be evaluated. An efficient and
inexpensive index of the uniformity of the passive film is proposed.
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