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Articles by author: Yuichi Setsuhara

• Development of Large Area Plasma Reactor Using Multiple Low-Inductance Antenna Modules for Flat Panel Display Processing
  Published in: Designing of Interfacial Structures in Advanced Materials and their Joints (p239)
• Millimeter-Wave Sintering of Si₃N₄
  Published in: The Science of Engineering Ceramics II (p45)
• Nano-Surface Modification of Silicon with Ultra-Short Pulse Laser Process
  Published in: Technology Evolution for Silicon Nano-Electronics (p117)
• Sintering of Al₂O₃-ZrO₂ Composites Using Millimeter-Wave Radiation
  Published in: The Science of Engineering Ceramics II (p41)
• Surface Modification of Nanopowder by Milling under Electric Discharge
  Published in: 11th International Ceramics Congress (p363)
• Ultra-Large Area RF Plasma Sources Employing Multiple Low-Inductance Internal-Antenna Modules for Flat Panel Display Processing
  Published in: PRICM 6 (p1237)