Semiconductors
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Molecular Beam Epitaxy
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Polycrystalline Semiconductors V
Like the previous conferences in this series, POLYSE '98 covered many aspects of polycrystalline semiconductors. Whereas earlier proceedings had included many contributions on basic research, for example on the structural properties of single grain boundaries, later proceedings had included more articles on solar cells and thin-film transistors, seemingly marking a transition to a more technology-oriented conference. However, the contributions to POLYSE '98 show that the POLYSE-series is again bringing together researchers from basic research as well as engineers working on devices. -
Ultra Clean Processing of Silicon Surfaces
The proceedings of the Fourth International Symposium on Ultra Clean Processing of Silicon Surfaces (UCPSS '98) cover all aspects of ultra-clean Si-technology: cleaning, contamination control, Si-surface chemistry and topography, and its relationship to device performance and process yield. New areas of concern include: cleaning at the interconnect level, resist strip and polymer removal (dry and wet), cleaning and contamination aspects of metallization, wafer backside cleaning and cleaning after Chemical-Mechanical-Polishing (CMP). -
Shallow Impurities in Semiconductors IV
I. TECHNIQUES . II. d DOPING . III. QUANTUM WELLS . IV. HYDROGEN IN SEMICONDUCTORS . V. BOUND EXCITONS . VI. IMPURITIES IN SILICON . VII. IMPURITIES IN Ge AND GexSi1-x. VIII. IMPURITIES IN COMPOUND SEMICONDUCTORS . IX. DX CENTRES . -
Optical Characterization of Semiconductors
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Beam Injection Assessment of Defects in Semiconductors
The 5th International Workshop on Beam Injection Assessment of Defects in Semiconductors (BIADS 98) focussed on many theoretical and experimental aspects of this topic. The aim was to bring together specialists working in the fields of both fundamental research and applications. There were more than 80 participants from 15 countries all over the world. -
Contemporary Studies in Condensed Matter Physics
Condensed matter physics is an important field, not only for physicists, but also for other scientists and engineers. It encompasses all types of solid and liquid materials. Solid-state phenomena in metals, semiconductors, dielectrics, magnetic and optical materials in all their forms (crystalline, amorphous, nanocrystalline, polymer, liquid) are being intensely investigated. This is being done both for fundamental reasons, and because of the numerous actual and possible practical applications. Therefore, condensed matter physics is also the keystone of electrical, electronic and mechanical engineering, technology, and the development of its methods thus has a direct influence upon applied sciences. -
Ion Implantation 1988
The volume presents 24 invited contributions. -
Gettering and Defect Engineering in Semiconductor Technology VII
Defect control relies more and more upon advanced fabrication approaches such as the use of slow pulling rates and hydrogen annealing. Gettering techniques remain of key importance in enhancing the device yield. -
Semiconductor Materials and Technology
The subject area of electronic devices has undergone a rapid expansion in recent years. New developments are continually accurring all over the world. Progress in the field of electronic devices is, however, dependent upon the production and characterization of device grade material. The science and technology of electronic materials has attracted somewhat less attention, as compared with device development.