Papers by Keyword: 3D Displacement

Abstract: The digital probe instrument is used for measure the microwave impedance of electronic circuit, which request both the precision and resolution of 3d displacement of the probe at the level of 1~2μm.As there are a lot of the points to be measured, it is a high labor intensity and low efficient work when person moving and positioning the right position through high magnification microscopy only by eyes, as well as some points that should be measured are easily ignored. A double-3d displacement sliding table consists of grating digital system is proposed in the paper, which could solve the problems successfully.

Abstract: For flexible 3D positioning of a complex 3D mechanism, it is needed to measure 3D displacement of the end-effecter of the mechanism in high precision and by non-contact method. It was common to use plural sensors or scales together to measure the 3D displacement. However, it is difficult to calibrate the sensitivities of the plural sensors or scales. A novel 3D displacement measurement is proposed using an optical system in which lens focuses are collected at the center of the sphere, which has been used for the radius measurement of the sphere. Instead of facing in the XY direction that has high sensitivity, new ideas are necessary for the measurement in the Z direction of the optics where focuses are collected at the center of the sphere. The displacement in the XY direction and the one in the Z direction can be measured at the same time by using a ring-shaped laser beam instead of a simple ray.