Papers by Keyword: Aluminium Oxide (Al₂O₃)

Abstract: Mesoporous cobalt doped aluminium oxide (Co/MAl₂O₃/RL) was synthesized using rubber latex as biotemplate by hydrothermal method. The synthesized mesoporous aluminium oxide samples were characterized by a combination of various physicochemical techniques, such as X-ray diffraction (XRD), N₂ adsorption/desorption and Fourier transform infrared (FT-IR). Espciallly, Co/MAl₂O₃/RL exhibited a high efficiency of acetaldehyde adsorption from mixed gaseous mixture.

Abstract: Superior flatband voltage (Vfb) stability of SiC-based metal-insulator-semiconductor (MIS) devices with aluminum oxynitride (AlON) gate dielectrics was demonstrated. MIS capacitors with gate insulators consisting of a thick pure aluminum oxide (Al2O3) and a thin underlying SiO2 layer fabricated on n-type 4H-SiC substrates showed a positive Vfb shift due to substrate electron injection depending on the applied gate bias and the thickness of the SiO2 interlayer. This large Vfb shift was greatly suppressed for devices with AlON/SiO2 stacked gate dielectrics, suggesting that electron trapping sites in Al2O3 film were mostly compensated for by nitrogen incorporation. This finding is helpful in realizing highly reliable SiC-based MIS field-effect-transistors (MISFETs) in terms of threshold voltage stability.