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Articles by keyword: «Chemical Mechanical Polishing (CMP)»

• A Comparison of Various Surface Finishes and the Effects on the Early Stages of Pore Formation during High Field Etching of SiC
  Published in: Silicon Carbide and Related Materials 2005 (p743)
• A Dishing Model for Chemical Mechanical Polishing of Plug Structures
  Published in: Advances in Abrasive Technology XIII (p276)
• A Fine Atomization CMP Slurry for Copper
  Published in: Mechanics, Solid State and Engineering Materials (p271)
• A Material Removal Modeling of Chemical Mechanical Polishing Based on Micro-Contact Mechanism
  Published in: Advanced Materials and Computer Science (p472)
• A Method to Improve Uniformity of Material Removal of Chemical Mechanical Polishing in LCOS Process
  Published in: Optics Design and Precision Manufacturing Technologies (p686)
• A Model of CMP about Magnetic Fluid and its Numerical Simulations
  Published in: Advances in Engineering Design and Optimization II (p333)
• A Novel Chemical-Mechanical Planarization Technology Using Pre-Thin-Surface Grinding in ULSI Manufacturing Process
  Published in: Precision Machining of Advanced Materials (p25)
• A Preliminary Model Accounting for the Suction Pressure in CMP Process
  Published in: Progresses in Fracture and Strength of Materials and Structures (p737)
• A Study on Surface Quality of GaN with CMP Polishing Process
  Published in: Materials Processing Technology (p1764)
• A Study on the Dressing Rate in CMP Pad Conditioning
  Published in: Advances in Abrasive Technology VI (p377)
• A Study on the Manufacture of the Next Generation CMP Pad with a Uniform Shape Using the Micro-Molding Method
  Published in: Advances in Abrasive Technology VI (p413)
• A Three-Dimensional Hydrodynamic Lubrication Model for Chemical-Mechanical Polishing Considering Pad Roughness
  Published in: Frontiers of Manufacturing and Design Science (p1213)
• Amorphous Diamond Dresser for CMP Fixed Abrasives Pad
  Published in: Advances in Abrasive Technology IX (p157)
• An Analyzing on Material Removal Mechanism in Chemical Mechanical Polishing of Cu
  Published in: Advances in Grinding and Abrasive Technology XV (p354)
• An Effect Contrast for Chemical Mechanical Polishing with Mechanical Polishing for Tungsten Steel
  Published in: Ultra-Precision Machining Technologies (p98)