Papers by Keyword: Chemical Solution Deposition Process

Abstract: Lead-free Ba(Ti1-xZrx)O3 (BTZ) thin films were fabricated on Pt(111)/Ti/SiO2/Si(100) substrates by the chemical solution deposition (CSD) process. The microstructure of the BTZ (x = 0.00 to 0.20) thin films was improved by additional sintering process, and their crystallite sizes were increased in each composition. The dielectric constant er and piezoelectric constant d33 of the BTZ thin films depended on the crystallite size. We give a guide for further investigation to improve the characteristics of BTZ thin films.