Keyword: "Chemical Vapor Deposition (CVD)"
Papers by keyword:
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(SiC/Ti3SiC2)n Multi-Layered Coatings Deposited by CVD

Authors: Sylvain Jacques, Houssam Fakih

1085

In Situ Growth of Carbon Nanotubes in Hydroxyapatite Matrix by Chemical Vapor Deposition

Authors: Xiao Ying Lu, Hao Wang, Sheng Yi Xia, Jian Xin Wang, Jie Weng

1671

2H-AlGaN/GaN HEMTs on 3C-SiC(111)/Si(111) Substrates

Authors: Katja Tonisch, Wael Jatal, Ralf Granzner, Mario Kittler, Uwe Baumann, Frank Schwierz, Jörg Pezoldt

1219

3-D Computational Modeling of SiC Epitaxial Growth in a Hot Wall Reactor

Authors: Wei Ji, Peter M. Lofgren, Christer Hallin, Chun-Yuan Gu

149

3-D Thermal and Flow Modeling of Hot Wall Epitaxial Chemical Vapor Deposition Reactors, Heated by Induction

Authors: Peter M. Lofgren, Christer Hallin, Chun-Yuan Gu, Wei Ji

153

4H-SiC (11-20) Epitaxial Growth

Authors: Tsunenobu Kimoto, Toshihiro Yamamoto, Zhi Yong Chen, Hiroshi Yano, Hiroyuki Matsunami

189

4H-SiC Delta-Doped Accumulation-Channel MOS FET

Authors: Toshiya Yokogawa, Kunimasa Takahashi, Osamu Kusumoto, Masao Uchida, Kenya Yamashita, Makoto Kitabatake

1077

4H-SiC Epitaxial Growth on SiC Substrates with Various Off-Angles

Authors: Hiroaki Saitoh, Tsunenobu Kimoto

89

4H-SiC Epitaxial Layers Grown on On-Axis Si-Face Substrate

Authors: Jawad ul Hassan, Peder Bergman, Anne Henry, Henrik Pedersen, Patrick J. McNally, Erik Janzén

53

A Designed Experiment Approach to Improvement and Understanding of the SiC Epitaxial Growth Process

Authors: James D. Oliver, Brian H. Ponczak

57

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