Keyword: "Cleaning"
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Acoustic Bubbles: Control and Interaction with Particles Adhered to a Solid Substrate

Authors: Robert Mettin, P.E. Frommhold, X. Xi, F. Cegla, H. Okorn-Schmidt, A. Lippert, F. Holsteyns

161

Angle Resolved XPS Characterization of the Formation of Cl and Br Bonds in Poly-Silicon Etching and Its Cleaning

Authors: Y.B. Kim, B. Beckx, Serge Vanhaelemeersch, W. Vandervorst

153

Angled XPS Analysis of Low-k Dielectric Surfaces after Cleaning

Authors: Y.S. Tan, Simon Y.M. Chooi, Chian-Yuh Sin, Ping-Yu Ee, M.P. Srinivasan, Simo Olavi Pehkonen

331

Automatic Wool Washing Machine Design and Research

Authors: Hong Chao Fan, Xin Hua Yi, Xiao Min Cheng, Ya Fen Zhu

377

Behaviour of High-k Dielectric Materials with Classical Cleaning Chemistries

Authors: Enrico Bellandi, Barbara Crivelli, Mauro Alessandri

15

Central Air-Conditioning Duct Cleaning System Based on SRV1

Authors: Lian Li, Zhi Yang Yan

3916

Characterization of a Cavitation Bubble Structure at 230 kHz: Bubble Population, Sonoluminescence and Cleaning Potential

Authors: Andrea Otto, Till Nowak, Robert Mettin, Frank Holsteyns, Alexander Lippert

11

Cleaning in Crystalline Si Solar Cell Manufacturing

Authors: Juergen Schweckendiek, Ronald Hoyer, Sebastian Patzig-Klein, Franck Delahaye, Gerry Knoch, Hartmut Nussbaumer

283

Cleaning of Silicon Surfaces for Nanotechnology

Authors: Oliver Senftleben, Hermann Baumgärtner, Ignaz Eisele

77

Cleaning System for Automated Optical Inspection of Heads of Bearing Rollers

Authors: Andrzej Zbrowski

289

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