Papers by Keyword: Cleaning

Abstract: In this paper we demonstrate an effective process control mechanism to significantly improve on the process performance of a BEOL post-etch cleaning process with an integrated partial or complete removal of the TiN HM (hard mask) layer by so called formulated chemistries on a single wafer processing tool. The novel process control mechanism enables a 50% reduction in chemical consumption while achieving an at least equivalent TiN etch uniformity.

Abstract: In the present article, the experimental research of electrochemical cleaning of oil-contaminated soil is provided. The decrease of oil concentration in the soil from 1100 mg/kg down to 250 mg/kg at the current density in the range from 22 A/m² to 174 A/m² during 90 minutes is shown. It has been established that there is the limit amount of charge required for effective cleaning, which amounted to 0.96·10⁷ coulombs per kilogram of oil. The electrodes placement variant for the proposed method realization in real conditions is described. It is shown that at a voltage between the electrodes about 18 V and the cleaning efficiency of 77% the energy consumption will be 173 MJ/kg of oil.

Abstract: In the present article we report a study on using microemulsion contains triton 100 to clean the surface of the wall paintings in saint Jeremiah monastery in Saqqara (4^th century) , Being these systems mainly composed of water (more than 80% by weight), it is using in a poultice or when the microemulsion added to the nano gel to improve it's performance , Fourier Transform Infra Red spectroscopy (FTIR),and The consolidation by nano lime dispersed in ethanol is used by brushing through Japanese paper and injecting the cracks.

Abstract: Congested sewage system causes many health related problem, since every work activity bring sewage workers into contact with perilous and toxic substances while removing the clogs occurring in the system. The major illness includes not just associated the relatively mild case of gastroenteritis, but also the potentially fatal diseases such as leptospirosis and hepatitis. The aim of the project is to implement a robot to remove the choke in the sewage system at low cost and to completely eliminate the human engagement for this task. A robot of that nature could also be used in critical places where human workers cannot be employed to remove the clog because of physical limitations. An improved design incorporating the improvisations learnt from earlier versions of the developed robots is to be attempted in this project work. The performance of this robot is analyzed through multi body dynamics after incorporating the robot into the work environment. After finalizing the design through the analysis, the robot would be fabricated. Finally the evaluation of the robot performance in real-time would be performed through experimental tests. The control mode would be semi-autonomous initially and then would be made completely autonomous. For convenience, the robot can also be operated manually from outside the sewage system based on the environment and requirement.

Abstract: A novel transducer for megasonic cleaning of photomasks presents an approach that differs from previous configurations, and appears to have unique features for cleaning while minimizing damage. As the cleaning and damage processes are determined by the presence of cavitation, a thorough acoustic analysis was performed on the device, by using a calibrated hydrophone scanned at the photomask location, and a quartz photomask with embedded sensors.

Abstract: The publication reviews recent applications of 172nm excimer radiation in bio-electric fields. It shows the broad field which already profit from the technology and also illustrates possible potentials. The principle of erasing static electricity from polyimide surfaces is explained as one application. The effect as a function of the dose is presented both for positive and negative charge and typical materials.In addition the VUV cleaning mechanism with 172nm excimer radiation is demonstrated by the mass spectroscopy of contaminations on the surface of a Si wafer.Surface energy changes of polyamides, glass and metal as a function of dose are presented as well as the change of the contact angle of water on the surface.Another application of surface energy enhancement is the polymer microchip production. Due to the surface activation, the bonding strength for the PMMA-Si combination is significantly enhanced. The results are presented in comparison to other surface treatment methods.Another presented application which profits from the surface activation is adhesive-free coupling. The mechanism of this application is explained and the adhesion strength as a function of material combination is presented. For 2 typical applications, the bonding strength is shown as a function of applied dose. A glance at other applications and an outlook is given as well.

Abstract: Copper indium gallium selenide/sulfide (CIGS) and copper zinc tin selenide/sulfide (CZTS) are two thin film photovoltaic materials with many similar properties. Therefore, three new processing steps – which are well-known to be beneficial for CIGS solar cell processing – are developed, optimized and implemented in CZTS solar cells. For all these novel processing steps an increase in minority carrier lifetime and cell conversion efficiency is measured, as compared to standard CZTS processing. The scientific explanation of these effects is very similar to its CIGS equivalent: the incorporation of alkali metals, ammonium sulfide surface cleaning, and Al₂O₃ surface passivation leads to electrical enhancement of the CZTS bulk, front surface and reduced front interface recombination, respectively.

Abstract: Dry cleaning process has been limited to particular field of removing native oxide because it has low etching selectivity for various oxide films. To increase etching selectivity, we added H₂O steam feeding step before NF₃ feeding step. From the experimental, we can change selectivity between oxide films from tens to hundreds.

Abstract: In this work the etching kinetics of Ge (100) is studied in acidic solutions containing and oxidizing agent. It is shown that the etch rate in the low etch-rate range is controlled by the concentration of the acid, oxidizing agent and the hydrodynamics of the system. The surface termination during etching has strong impact on the etching kinetics. Finally, we discuss the stability of the Ge (100) surface in water and relate this to the low solubility of the Ge suboxides

Abstract: In Situ gas phase passivation methods can enable new channel materials. Toward this end pure anhydrous HOOH and H2NNH2 membrane gas delivery methods were developed. Implementation led to Si-OH passivation of InGaAs(001) at 350C and Si-N-H passivation of SiGe(110) at 285C. XPS and initial electrical characterization has been carried out. Feasibility for In Situ dry surface preparation and passivation was demonstrated.