Papers by Keyword: Crystal Separation

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Abstract: 6-inch 4H-SiC crystal ingot was successfully separated from a seed holder by the contraction enhancement of adhesive. The resin used as an adhesive with 10~30% in contraction ratio during the cooling was selected. The crack between seed holder and grown SiC crystal was observed to be formed after the cooling procedure and the crystal was easily separated from the seed holder without any machining process for the separation. The warp value and the rocking curve value of SiC crystal grown with modified adhesive was observed to be smaller than those of SiC crystal with conventional method.
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