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Keyword: "Dislocation Conversion"
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Paper Title Page

Developing an Effective and Robust Process for Manufacturing Bipolar SiC Power Devices

Authors: Joseph J. Sumakeris, Brett A. Hull, Michael J. O'Loughlin, Marek Skowronski, Vijay Balakrishna

77

Techniques for Minimizing the Basal Plane Dislocation Density in SiC Epilayers to Reduce Vf Drift in SiC Bipolar Power Devices

Authors: Joseph J. Sumakeris, Peder Bergman, Mrinal K. Das, Christer Hallin, Brett A. Hull, Erik Janzén, H. Lendenmann, Michael J. O'Loughlin, Michael J. Paisley, Seo Young Ha, Marek Skowronski, John W. Palmour, Calvin H. Carter Jr.

141

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