| Paper Title | Page |
|---|---|
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Micromachining of Novel SiC on Si Structures for Device and Sensor Applications Authors: Christian Förster, Volker Cimalla, M. Stubenrauch, Carsten Rockstuhl, Klemens Brueckner, Matthias A. Hein, Jörg Pezoldt, Oliver Ambacher |
1111 |