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Articles by keyword: «Dry Etching»

• 4H Silicon Carbide Etching Using Chlorine Trifluoride Gas
  Published in: Silicon Carbide and Related Materials 2007 (p655)
• Effect of Substrate Heating in Thickness Correction of Quartz Crystal Wafer by Plasma Chemical Vaporization Machining
  Published in: Advances in Precision Engineering (p218)
• Femtosecond-Pulse Laser Microstructuring of Semiconducting Materials
  Published in: Semiconductor Processing and Characterization with Lasers (p17)
• Hydrogen in III-V Compound Semiconductors
  Published in: Hydrogen in Compound Semiconductors (p393)
• Inductively Coupled Plasma Etching of SiC for Power Switching Device Fabrication
  Published in: Silicon Carbide, III-Nitrides and Related Materials (p833)
• Influence of Trenching Effect on the Characteristics of Buried-Gate SiC Junction Field-Effect Transistors
  Published in: Silicon Carbide and Related Materials 2001 (p1235)
• Laser Induced Backside Dry Etching of BK-7 and Quartz in Vacuum
  Published in: Advanced Materials XII (p261)
• Nanofabrication of II-VI Semiconductor Quantum Wires and Dots
  Published in: II-VI Compounds and Semimagnetic Semiconductors (p87)
• Reactive Ion Etching Characterization of a-Si:H and a-SiC:H Thin Films
  Published in: Hydrogenated Amorphous Silicon (p347)
• Realization of Silicon Nitride Template for Nanoimprint: A First Result
  Published in: Nanoscience and Technology (p669)
• Sources of Hydrogen in III-V Device Processing
  Published in: Hydrogen in Compound Semiconductors (p141)