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Articles by keyword: «Elastic Recoil Detection Analysis (ERDA)»

• Hydrogen Measurements in SiN_x: H/Si Thin Films by ERDA
  Published in: THERMEC 2006 (p3551)
• Hydrogen Redistribution and Void Formation in Hydrogen Plasma Treated Czochralski Silicon
  Published in: Gettering anf Defect Engineering in Semiconductor Technology IX (p315)
• Ion Beam Analysis and Applications in On-Line Monitoring of Ion Induced Modifications of Materials
  Published in: Materials Science Applications of Ion Beam Techniques (p405)
• Ion Beam Synthesis of Silicon Carbide
  Published in: PIM & ASIP 2004 (p51)
• Ion Beam Techniques for Study of Diffusion
  Published in: Disordered Materials (p433)
• Recent Progress in the Understanding of Si-Nanostructures Formation in a-SiN_x:H Thin Film for Si-Based Optoelectronic Devices
  Published in: Latest Trends in Condensed Matter Physics (p1)
• Silicon Oxynitride ECR-PECVD Films for Integrated Optics
  Published in: Cross-Disciplinary Applied Research in Materials Science and Technology (p149)