Keyword: "Epitaxial Growth"
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10 × 100 mm 4H-SiC Epitaxial Growth by Warm-Wall Planetary Reactor

Authors: Lin Dong, Guo Sheng Sun, Jun Yu, Guo Guo Yan, Wan Shun Zhao, Lei Wang, Xin He Zhang, Xi Guang Li, Zhan Guo Wang

239

3-D Computational Modeling of SiC Epitaxial Growth in a Hot Wall Reactor

Authors: Wei Ji, Peter M. Lofgren, Christer Hallin, Chun-Yuan Gu

149

3-D Thermal and Flow Modeling of Hot Wall Epitaxial Chemical Vapor Deposition Reactors, Heated by Induction

Authors: Peter M. Lofgren, Christer Hallin, Chun-Yuan Gu, Wei Ji

153

4H-SiC Carbon-Face Epitaxial Layers Grown by Low-Pressure Hot-Wall Chemical Vapor Deposition

Authors: Kazutoshi Kojima, Tetsuo Takahashi, Yuuki Ishida, Satoshi Kuroda, Hajime Okumura, Kazuo Arai

209

4H-SiC Epitaxial Growth for High-Power Devices

Authors: Hidekazu Tsuchida, Isaho Kamata, Tamotsu Jikimoto, Toshiyuki Miyanagi, Kunikaza Izumi

131

4H-SiC Epitaxial Growth on Carbon-Face Substrates with Reduced Surface Roughness

Authors: Takashi Aigo, M. Sawamura, Tatsuo Fujimoto, Masakazu Katsuno, Hirokatsu Yashiro, Hiroshi Tsuge, Masashi Nakabayashi, Taizo Hoshino, Noboru Ohtani

153

4H-SiC Homoepitaxial Growth on Substrates with Different Off-Cut Directions

Authors: Birgit Kallinger, Bernd Thomas, Patrick Berwian, Jochen Friedrich, Gerd Trachta, Arnd Dietrich Weber

55

4H-SiC PiN Diodes Fabricated Using Low-Temperature Halo-Carbon Epitaxial Growth Method

Authors: Bharat Krishnan, Joseph Neil Merrett, Galyna Melnychuk, Yaroslav Koshka

925

4H-SiC Substrate Orientation Effects on Hydrogen Etching and Epitaxial Growth

Authors: B.E. Landini, George R. Brandes

185

AlN Epitaxial Films Grown by ECR Plasma Assisted Metalorganic Chemical Vapor Deposition under Controlled Plasma Condition in Afterglow Region

Authors: Kanji Yasui, S. Hoshino, Takashi Akahane

1511

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