Keyword: "Epitaxial Layer"
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A Simple Mapping Method for Elementary Screw Dislocations in Homoepitaxial SiC Layers

Authors: Seo Young Ha, William M. Vetter, Michael Dudley, Marek Skowronski

443

Advances in Multi- and Single-Wafer SiC Epitaxy for the Production and Development of Power Diodes

Authors: Christian Hecht, Bernd Thomas, René A. Stein, Peter Friedrichs

95

Basal Plane Dislocations in 4H-SiC Epilayers with Different Dopings

Authors: Xuan Zhang, Masahiro Nagano, Hidekazu Tsuchida

27

Bulk Radiation Damage Induced in Thin Epitaxial Silicon Detectors by 24 GeV Protons

Authors: V. Khomenkov, D. Bisello, M. Boscardin, Mara Bruzzi, A. Candelori, G.-F. Dalla Betta, A.P. Litovchenko, C. Piemonte, R. Rando, F. Ravotti, N. Zorzi

315

Challenges in Large-Area Multi-Wafer SiC Epitaxy for Production Needs

Authors: Bernd Thomas, Christian Hecht, René A. Stein, Peter Friedrichs

135

Characterization of SiC Epitaxial Wafers by Photoluminescence under Deep UV Excitation

Authors: Michio Tajima, M. Tanaka, Norihiro Hoshino

597

Complex Study of SiC Epitaxial Films

Authors: E.M. Geyfman, V.V. Chibirkin, G.Yu. Kamentsev, N.A. Gartsev, N.M. Davydova, B.P. Surin

593

Distribution Profile of Deep Levels in SiC Observed by Isothermal Capacitance Transient Spectroscopy

Authors: Makato Fujimaki, Rudi Ono, Mitsuhiro Kushibe, Koh Masahara, Kazutoshi Kojima, Takashi Shinohe, Hideyo Okushi, Kazuo Arai

851

Electrical and Optical Study of 4H-SiC CVD Epitaxial Layers Irradiated with Swift Heavy Ions

Authors: Evgenia V. Kalinina, G. Kholuyanov, G. Onushkin, D.V. Davydov, Anatoly M. Strel'chuk, A.S. Zubrilov, Anders Hallén, Andrey O. Konstantinov, V.A. Skuratov, J. Staňo

467

Electrical Properties of SiGe Epitaxial Layers for Photovoltaic Application as Studied by Scanning Electron Microscopical Methods

Authors: O. Krüger, Winfried Seifert, Martin Kittler, A. Gutjahr, M. Konuma, K. Said, Jef Poortmans

509

Showing 1 to 10 of 36 Papers
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