Keyword: "Epitaxy"
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4H-SiC CVD Epitaxial Layers with Improved Structural Quality Grown on SiC Wafers with Reduced Micropipe Density

Authors: Evgenia V. Kalinina, A.S. Zubrilov, V. Solov'ev, N.I. Kuznetsov, Anders Hallén, Andrey O. Konstantinov, S. Karlsson, S.V. Rendakova, Vladimir Dmitriev

505

4H-SiC Device Scaling Development on Repaired Micropipe Substrates

Authors: T.E. Schattner, Jeff B. Casady, M.C.D. Smith, Michael S. Mazzola, Vladimir Dmitriev, S.V. Rentakova, Stephen E. Saddow

1203

4H-SiC Epitaxy with Very Smooth Surface and Low Basal Plane Dislocation on 4 Degree Off-Axis Wafer

Authors: Gil Yong Chung, Mark J. Loboda, Jie Zhang, Jian Wei Wan, E.P. Carlson, T.J. Toth, Robert E. Stahlbush, Marek Skowronski, R. Berechman, Siddarth G. Sundaresan, Ranbir Singh

123

A Designed Experiment Approach to Improvement and Understanding of the SiC Epitaxial Growth Process

Authors: James D. Oliver, Brian H. Ponczak

57

Advanced Real Time Metrology of AlGaN/GaN and InGaN/GaN Epitaxy

Authors: Tong Ho Kim, Soo Jeong Choi, April S. Brown, Maria Losurdo, Giuseppe Valerio Bianco, Maria M. Giangregorio, Giovanni Bruno

124

Advances in SiC Materials and Technology for Schottky Diode Applications

Authors: Lea Di Cioccio, Thierry Billon

1119

AFM Study of In Situ Etching of 4H and 6H SiC Substrates

Authors: S. Karlsson, Nils Nordell

363

AlGaN Solid Solution Grown on 3C-SiC(111)/Si(111) Pseudosubstrates

Authors: Katja Tonisch, Robert Benzig, Gernot Ecke, Jörg Pezoldt

103

Analysis of SiC CVD Growth in a Horizontal Hot-Wall Reactor by Experiment and 3D Modelling

Authors: Y. Shishkin, Rachael L. Myers-Ward, Stephen E. Saddow, Alexander Galyukov, A.N. Vorob'ev, D. Brovin, D. Bazarevskiy, R.A. Talalaev, Yuri N. Makarov

61

Applications of ZrO2 - CeO2 - La2O3 Films in Multilayered Oxide Heterostructures

Authors: Anatole N. Khodan, J.-P. Contour, D. Michel

47

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