HOME CONTACT My eBook

Username: Password:

> @scientific.net

Articles by keyword: «Etching»

• 4H-SiC Surface Morphology Etched Using ClF₃ Gas
  Published in: Silicon Carbide and Related Materials 2009 (p787)
• A Comparison of Various Surface Finishes and the Effects on the Early Stages of Pore Formation during High Field Etching of SiC
  Published in: Silicon Carbide and Related Materials 2005 (p743)
• A New Industrial Etching & Drying Process for MEMS to Prevent Collapse of Microstructures
  Published in: Ultra Clean Processing of Silicon Surfaces VI (p73)
• A New Method of Making Grating - Etched by SPM
  Published in: Manufacturing Process Technology (p4077)
• A Study of the Influence of Typical Wet Chemical Treatments on the Germanium Wafer Surface
  Published in: Ultra Clean Processing of Silicon Surfaces VII (p27)
• A Technique for Delineating Defects in Silicon
  Published in: Gettering anf Defect Engineering in Semiconductor Technology IX (p753)
• Abrasive-Free Planarization of 3-Inch 4H-SiC Substrate Using Catalyst-Referred Etching
  Published in: Silicon Carbide and Related Materials 2010 (p493)
• AFM Study of In Situ Etching of 4H and 6H SiC Substrates
  Published in: Silicon Carbide, III-Nitrides and Related Materials (p363)
• Anisotropic Etching of SiC in the Mixed Gas of Chlorine and Oxygen
  Published in: Silicon Carbide and Related Materials 2007 (p659)
• Beveling of Silicon Carbide Wafer by Plasma Chemical Vaporization Machining
  Published in: Silicon Carbide and Related Materials 2007 (p843)
• Characterization of Surface Defects of Highly N-Doped 4H-SiC Substrates that Produce Dislocations in the Epitaxial Layer
  Published in: Silicon Carbide and Related Materials 2009 (p351)
• Columnar Pore Growth in n-Type 6H SiC
  Published in: Silicon Carbide and Related Materials 2005 (p739)
• Contamination and Cleaning of GaAs-(100) Surfaces
  Published in: Defects in Semiconductors 18 (p1967)
• Corrosion Mechanism at the Gas-Solid-Liquid Triple Line for Aluminium Droplets on Alumina Substrates under Vacuum
  Published in: High Temperature Corrosion and Protection of Materials 5 (p263)
• Co-Solvent Effect on the HF/CO₂ Dry Etching of Sacrificial Oxides
  Published in: Ultra Clean Processing of Semiconductor Surfaces IX (p235)