Papers by Keyword: External Gettering

Paper TitlePage

Comparison of Nickel and Iron Gettering in Cz Silicon Wafers
Authors: F.G. Kirscht, B. Orschel, S. Rouvimov, M. Shabani
367
A Quantitative Method of Metal Impurities Depth Profiling for Gettering Evaluation in Silicon Wafers
Authors: Mohammad B. Shabani, T. Yoshimi, S. Okuuchi, A. Kaniava
81
Influence of Oxygen on External Phosphorus Gettering in Disordered Silicon Wafers
Authors: Santo Martinuzzi, Isabelle Périchaud
1629
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