Papers by Keyword: Fast Tool Servo (FTS)

Abstract: It is designed a Fast Tool Servo (FTS) device which based on piezoelectric ceramic and jointed by flexible hinge. The flexible hinge has been analyzed and optimized both by the theoretical calculation and finite element analysis; and it has been physically manufactured and tested by means of pressure sensor and laser interferometer. The stiffness model was established. The driving voltage and displacement relationship has been revealed. The results indicate that this FTS system can reach a travel range for 60μm,the frequency response precedes 150Hz within 39μm travel range.

Abstract: The Fast-Tool-Servo (FTS) is widely used for micro-structure manufacturing especially for micro optical lens. The working principle of FTS presented by Qiang Liu et.al is that, a voice coil motor and a piezoelectric（PZT） actuator are used as the driving elements, and two flexure hinges are developed as the guide mechanisms. However, vertical displacement jump happens when the flexure hinges are driven by a voice coil motor or a piezoelectric actuator. In this paper, a new amplified structure is presented, allowing the horizontal motion while reducing the vertical displacement jump. The working principle is that, the piezoelectric actuator is applied to a beam which has two flexure hinges, one is linked to the frame, and the other is linked to a tool holder which is situated through two parallel membranes. When the piezoelectric actuator deforms, the beam will rotate around the frame, while the displacement is amplified at the other end, causing the tool holder’s motion and the membranes are forced to bend, while the vertical motion is restrained by the membranes. As a result, the presented membrane based flexure structure is able to amplify the motion of the piezoelectric actuator. In addition, the vibration frequency of the membrane is easy to be adjusted by the preloaded force. It is important to know when the FTS is working at different frequency. The performance of the presented structure is analyzed by structural dynamics coupled with piezoelectric, and the parameters of the structure are optimized to remain linear relation between the tool holder and the piezoelectric actuator, while the vertical displacement jump is much smaller than the structure presented in reference.

Abstract: Flexure-hinge mechanisms are commonly used in the design of translational micro/nanopositioning stages. They can offer a drive system with negligible friction and no need for lubrication. Usually, a large motion range requires the use of a very long actuator which could interfere with a tight workplace. A lever which amplifies the input motion of a short actuator is an effective technique to solve the problem. This paper presents the methodology for the design of a lever-type magnified flexure mechanism used for the ultra precision fast tool servo (FTS) system. A lever type hinge mechanism is designed and utilized to guide the tool holder and to preload the PZT actuator. A low capacitance PZT actuator is adopted to match the given amplifier to achieve optimum performance of device displacement. A high resolution capacitive sensor is utilized to measure the natural displacement of the tool holder. An amplifier with a multiplying factor of 12 is utilized to magnify the drive signal for the expansion and retraction of the PZT actuator. Meanwhile, the motion range of the FTS system can reach up to 98.12 μm with a primary resonant frequency of about 460 Hz, and the amplification of the lever flexure mechanism is approximately 5 as calculated from the experiment.

Abstract: Micro-structured surfaces on brittle materials, e.g. ceramic and glass, are gaining increasing application in a range of areas. In this paper, fast tool servo (FTS) diamond turning has been applied to machine micro-structured surfaces on brittle materials and the machined surfaces has been observed to study its machining mechanism. A machining model is presented to enable ductile-regime machining of the brittle material. Based on the model, machining characteristics can be predicted for given cutting conditions. Experimental investigation on machining of a micro-structured surface verified that ductile-regime machining can be ensured on the entire surface through path planning simulation based on the machining model.

Abstract: Firstly, the superior performance and industrial application prospects of non-rotationally symmetric (NRS) optical surfaces are detailed. Secondly, those high precision machining processes to generate NRS optical surfaces are overviewed, it’s been stressed that fast tool servo (FTS) based diamond turning has been the most promising, cost-effective, and high precision machining process to generate NRS surfaces. Finally, the recent research progress in FTS based diamond turning of NRS optical surfaces is remarked, both the tool trajectory generation and the FTS actuation techniques are discussed, the limitations of the existing researches are disclosed, and then the academic and technological researches to be urgently carried out are suggested.

Abstract: This paper discusses the design of a new type fast tool servo (FTS) for precision diamond turning. The FTS has two degrees. One of them is transversal along the Z axis of lathe and the other is rotation around the Y axis. Both of the two movements are driven by electromagnetic force. The moving assembly is designed to be parallel structure for guarantying both of the two movements has similar response frequency and maximum stroke. The output force of normal electromagnetic force generated by magnetic flux bias motor has been calculated. The design of transmission mechanism has been presented. The result of acceleration calculation shows that the FTS achieves acceleration up to about 650G in both directions of movement.

Abstract: Fast tool servo diamond turning is a promising machining method for precision and complex micro-structured surfaces with spatial wavelength above tens of microns. It is crucial to measure and characterize the micro-structured surfaces to sub-micrometer form accuracy. The general purpose measurement instruments are not able to evaluate the true form accuracy between the measured surface and designed surface. Therefore, in this paper an automatic surface characterization method is proposed to evaluate the form accuracy for micro-structured surfaces. The fabricated surfaces can be measured by any high-resolution measurement instruments. After the surface measurement, an iterative closest point (ICP) algorithm is modified to align the measured surfaces to the designed surfaces with the form error evenly distributed over the whole surface. After alignment, the designed surface height corresponding to each measured point is calculated to form the areal error map. 3D surface parameters are chosen and calculated from the error map to characterize the surface form error. Experimental results demonstrate the effectiveness of the proposed surface characterization method.

Abstract: Increasing demand for ultraprecision components with micro-structured surfaces has attracted focus on diamond turning research. In this paper, a fast tool servo (FTS) based diamond turning machine is presented for fabricating micro-structured surfaces with high accuracy. A design criterion is established to serve as a guide in choosing or designing a suitable type of FTS for a micro-structured surface. Experiments on fabricating sampled micro-structured surfaces are carried out to demonstrate the effectiveness of the designed FTS based diamond turning machine.

Abstract: Optical components with complex surfaces or microstructures are more and more widely used, but it is very difficult to manufacture these components by using traditional mechanical fabrication methods. Fast Tool Servo (FTS) system driven by piezoelectric ceramic (PZT) can manufacture these complex surfaces or microstructures efficiently and accurately, owing to its high response frequency, good dynamic performances and high stiffness. In this paper, the cutting characteristics are studied in the FTS machining process, and the identifying algorithm of tool interference is given. A set of high-powered FTS system is developed, which consists of PZT, fast feeding device, DSP28335 control panel and ultraprecision machine tool. The testing results indicate that the FTS system’s motion resolution is 1nm, the stroke is 90μm, and the response frequency is 220Hz while moving distance is 36μm. On the basis of above work, three kinds of typical workpieces with complex surfaces are manufactured by using FTS system. The measuring results indicate that surface accuracy can reach PV 0.14μm, the roughness is less than Ra 12nm, and the means are presented to improve the machining accuracy.

Abstract: This paper presents a new simulation system for ultra-precision diamond turning of optical free-form surfaces based on fast tool servo (FTS). The functions including evaluation and analysis of optical free-form surfaces manufacturing errors, optimization for tool path, etc, are proposed. The simulation modules and functional structure of the system are designed in accordance with the functions. The errors in the process of machining can be found in advance through the simulation. Then the NC code will be modified timely. The proposed method can be used to improve product quality, shorten the development cycle, reduce costs and optimize machining process.