Papers by Keyword: Fatigue Bending Test

Abstract: Two kind of on-chip integrated fatigue bending test structures are designed through system-level simulation method based on macromodels to measure the fracture strength and fatigue mechanical properties of polysilicon thin films. The first on-chip fatigue test structure is actuated by V-beam thermal actuator, and the other test structure actuated by electrostatic comb. The static and dynamic analysis was performed by Coventorware Architect module using self-bulid reduced order model described with the MAST hardware language and some other commercial parts from Coventorware parts library. The structural dimension parameters are determined and optimized according to system-level simulation and the computing result has shown that the self-build macromodels and the on-chip integrated test system are efficient and reliable. Two kinds of polysilicon on-chip fatigue bending test structure were fabricated with two-layer polysilicon surface micromachining process in Institute of Microelectronics, Peking University.

Abstract: Effects of surface defect size and the method used to obtain the defect itself on bending fatigue behaviour of nitrided and shot peened steel was studied. Two different series of 15 sandglass specimens with a microhole in the minimum section generated after nitriding and shot peening treatments were considered. In one series the microholes were obtained by controlled electro-erosion. In the other series microholes were obtained by indentation, much more invasive that electro-erosion, simulating a damage due to a mechanical impact or scratch on the surface material, common on real components during the life span. In both cases the microholes act as a pre-existent crack. The results show that defects obtained by indentation lead to a minor fatigue limit with respect of larger defects obtained by electro-erosion. This was interpreted as the modification of the residual stress field due to the mechanical indentation. On the basis of the results some consideration is formulated about generating micro-holes with one of the discussed ways.