Papers by Keyword: Gate-Oxide Integrity

Paper TitlePage

Gate-Oxide Integrity Evaluation Using Non-Ideal Metal-Oxide-Silicon Capacitor Structures
Authors: Teimuraz Mchedlidze
735
Application of Gate Oxide Integrity to the Evaluation of the Efficiency of Internal and External Gettering Sites in Si Wafers
Authors: Sergei V. Koveshnikov, David Beauchaine, Zbigniew J. Radzimski, Li Ling, K.V. Ravi
393
Defect Control in Nitrogen Doped Czochralski Silicon Crystals
Authors: Atsushi Ikari, Katsuhiko Nakai, Y. Tachikawa, H. Deai, Y. Hideki, Yasumitsu Ohta, Naoya Masahashi, S. Hayashi, T. Hoshino, Wataru Ohashi
161
Gate Oxide Defect Analysis Using Scanning Electron Microscopy (SEM)/Metal Oxide Semiconductor (MOS)/Electron Beam Induced Current (EBIC) with Sub-Nano Ampere Current Breakdown
Authors: M. Tamatsuka, K. Miki
395
Combined MOS/EBIC and Tem Study of Electrically Active Defects in SOI Wafers
Authors: O.V. Kononchuk, I.E. Bondarenko, George A. Rozgonyi
61
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