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Articles by keyword: «Gettering»

• About a Novel Gettering Procedure for Multicrystalline Silicon Samples
  Published in: Polycrystalline Semiconductors IV (p485)
• Accumulation of Hydrogen within Implantation-Damaged Areas in Processed Si:N and Si:O
  Published in: Gettering and Defect Engineering in Semiconductor Technology XIII (p319)
• An Express Method for the Study of Planar Homogeneity of Diffusion Lenght in Multicrystalline Solar Silicon
  Published in: Gettering and Defect Engineering in Semiconductor Technology XIII (p449)
• Application of Gate Oxide Integrity to the Evaluation of the Efficiency of Internal and External Gettering Sites in Si Wafers
  Published in: Gettering anf Defect Engineering in Semiconductor Technology IX (p393)
• Binding of Copper to Nanocavities in Silicon
  Published in: Defects in Semiconductors 17 (p1635)
• Buried Insulating Layer Formation in Cz Si Wafers after Helium Implantation, Nitrogen Plasma Treatment and Annealing
  Published in: Gettering and Defect Engineering in Semiconductor Technology XIII (p91)
• Characterization of Deep Levels in SiC by Photoluminescence Spectroscopy and Mapping
  Published in: Silicon Carbide, III-Nitrides and Related Materials (p481)
• Comparison of External Gettering Efficiency of Phosphorus Diffusion, Aluminium-Silicon Alloying and Helium Implantation in Silicon Wafers
  Published in: Gettering and Defect Engineering in Semiconductor Technology VII (p115)
• Controlled Gettering of Implanted Platinum in Silicon Produced by Helium Co-Implantation
  Published in: Gettering and Defect Engineering in Semiconductor Technology X (p559)
• Copper in Silicon: Quantitative Analysis of Internal and Proximity Gettering
  Published in: Defects in Semiconductors 19 (p461)
• Copper In-Depth Distribution in Hydrogen Implanted Cz Si Wafers Subjected to Two-Step Annealing
  Published in: Gettering and Defect Engineering in Semiconductor Technology XIII (p161)
• Defects Characterization in SiC by Scanning Photoluminescence Spectroscopy
  Published in: Silicon Carbide and Related Materials 2000 (p393)
• Design: New Material Challenge for Silicon ULSI
  Published in: Gettering and Defect Engineering in Semiconductor Technology VII (p1)
• Determination of Effective Diffusion Coefficient of Copper in Silicon by Diffusion from Bulk into the Polysilicon Backside
  Published in: Gettering and Defect Engineering in Semiconductor Technology XI (p385)
• Diffusion and Gettering of Transition Metals in 4H-SiC
  Published in: Silicon Carbide and Related Materials 2011 (p225)