Papers by Keyword: Hard Brittle Material

Abstract: Precision slicing tests were performed for single-crystal silicon by using a newly developed dicing wire saw system and diamond wires. The developed dicing wire saw enables slicing thick workpiece of hard and brittle materials which could not be sliced by conventional dicing machines. To achieve high precision and efficiency, the dicing wire saw system adopted tension control and high speed control technologies which provides a maximum wire feeding speed of 2000m/min. In this study, the diamond wire was driven in a single direction at a speed of 750-1750m/min and the slicing force, wire wear and workpiece surface roughness after slicing were investigated experimentally. The results showed that as a new slicing system, the developed dicing wire saw was useable for high-precision slicing of thick workpiece.

Abstract: Abrasive waterjet machining (AWJ) is one of the fastest growing non-conventional machining methods. However, low pressure and fine abrasive implemented in AWJ precision machining for reducing the surface damage reduce the efficiency. Therefore ultrasonic vibration is considered to apply on the workpiece to improve the machining efficiency. In order to analyze the effect of the vibration on erosion in AWJ machining, smoothed particle hydrodynamics (SPH) is used to simulate the erosion process for avoiding the mesh distortion in finite element method (FEM) when simulating large deformation and high strain rate problems. The results show that the application of ultrasonic vibration can effectively improve the erosion rate due to the dynamics variation of the erosion process.

Abstract: The requirement of the ultra-precision machine tools for ductile cutting of hard brittle materials was examined experimentally. One of the essential factors of achieving ductile mode cutting was not only high-resolution feedback control but also the dynamic performance of the machine tool in forming solid immersion lens of monocrystalline silicon. We also proposed newly developed method for ultra-precision machine tools, which does not have enough high dynamic performance in order to achieve ductile mode cutting of the hard brittle materials. An additional device consisted of air slider on the machine tool was applied to cutting of glass in order to keep stable ductile mode cutting. We fabricated high-value added structure, which are designed a diffraction grating, consisted of micro groove on a borosilicate crown glass surface with the developed device.