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Articles by keyword: «Ion-Implantation»

• 2D Simulation of under-Mask Penetration in 4H-SiC Implanted with Al⁺ Ions
  Published in: Silicon Carbide and Related Materials 2010 (p421)
• 4H-SiC DMOSFETs Processed Using Graphite Capped Implant Activation Anneal
  Published in: Silicon Carbide and Related Materials 2005 (p1265)
• 4H-SiC Nuclear Radiation p-n Detectors for Operation up to Temperature 375 ºC
  Published in: Silicon Carbide and Related Materials 2008 (p849)
• 6H-SiC Crystallinity Behaviour upon B Implantation Studied by Raman Scattering
  Published in: Silicon Carbide, III-Nitrides and Related Materials (p741)
• A Comparative Study of High-Temperature Aluminum Post-Implantation Annealing in 6H- and 4H-SiC, Non-Uniform Temperature Effects
  Published in: Silicon Carbide and Related Materials 2001 (p827)
• A New Approach to Study the Damage Induced by Inert Gases Implantation in Silicon
  Published in: Gettering and Defect Engineering in Semiconductor Technology XI (p357)
• A New Type of SiC Gas Sensor with a pn-Junction Structure
  Published in: Silicon Carbide and Related Materials 2001 (p1427)
• A Short History of Pattern Effects in Thermal Processing
  Published in: Rapid Thermal Processing and beyond: Applications in Semiconductor Processing (p355)
• A Study of the Structural, Mechanical and Tribological Properties of Ti-Al-N Coatings Post-Treated by Carbon Implantation
  Published in: Synthesis and Properties of Surface Coatings (p7)
• Ab Initio Studies of Local Vibrations of Small Self-Interstitials Aggregates in Silicon
  Published in: Gettering and Defect Engineering in Semiconductor Technology XI (p175)
• Acceptor Deactivation in Silicon Nanowires Analyzed by Scanning Spreading Resistance Microscopy
  Published in: Gettering and Defect Engineering in Semiconductor Technology XIV (p50)
• Activation Study of Implanted N⁺ in 6H-SiC by Scanning Capacitance Microscopy
  Published in: Silicon Carbide and Related Materials - 2002 (p375)
• Advances in SiC Materials and Technology for Schottky Diode Applications
  Published in: Silicon Carbide and Related Materials 2001 (p1119)
• Al Ion Implantation of SiC Coated Carbon Fiber-Reinforced SiC Matrix Composites by Metal Vapor Vacuum Arc Ion Source
  Published in: Advanced Materials (p76)
• An Experimental Study of Ion Beam and ECR Hydrogenation of Self-Ion Implantation Damage in Silicon by Admittance Spectroscopy and X-Ray Triple Crystal Diffractometry
  Published in: Gettering and Defect Engineering in Semiconductor Technology VII (p483)