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Articles by keyword: «Laser Annealing»

• A Short History of Pattern Effects in Thermal Processing
  Published in: Rapid Thermal Processing and beyond: Applications in Semiconductor Processing (p355)
• A Study on the Characteristics of the Polycrystalline Silicon Annealed by the SHG Nd:YAG Laser
  Published in: Eco-Materials Processing and Design XII (p9)
• Advanced Annealing Schemes for High-Performance SOI Logic Technologies
  Published in: Rapid Thermal Processing and beyond: Applications in Semiconductor Processing (p387)
• An Overview of ms Annealing for Deep Sub-Micron Activation
  Published in: Rapid Thermal Processing and beyond: Applications in Semiconductor Processing (p257)
• Defect Control Process Technologies for High-Performance Polycrystalline Si Thin-Film Transistor Fabrication
  Published in: Polycrystalline Semiconductors VII (p49)
• Excimer Laser Annealing of Ion-Implanted 6H-Silicon Carbide
  Published in: Silicon Carbide and Related Materials - 1999 (p873)
• Heat Transfer Analysis and Optimization for Wafer System of Laser Annealing Equipment
  Published in: Anti-Fatigue Design and Manufacturing Technologies I (p91)
• High-Quality Polysilicon Thin Film Recrystallization by Laser Annealing
  Published in: Advanced Research on Advanced Structure, Materials and Engineering (p26)
• In Situ Fast Temperature Measurement of Silicon Thin Films during the Excimer Laser Annealing
  Published in: Experimental Mechanics in Nano and Biotechnology (p195)
• Laser Anneal-Induced Effects on the NBTI Degradation of Advanced-Process 45nm High-K PMOS
  Published in: Manufacturing Process Technology (p1862)
• Laser Annealing of Implanted Semiconductor Layers – One Bridge to Nano-Processing
  Published in: Rapid Thermal Processing and beyond: Applications in Semiconductor Processing (p237)
• Laser-Induced Modification of the Surface State and Optical Properties of CdTe Crystals
  Published in: Global Research and Education (p28)
• Magnetic Anisotropy of Co Films Annealed by Laser Pulses
  Published in: Perspectives of nanoscience and nanotechnology (p69)
• Numerical and Experimental Study on Pulsed-Laser Heating Process of ZnO Films
  Published in: Advances in Nanomaterials and Processing (p311)
• Optical Characterization of Lattice Damage and Recovery in Ion-Implanted and Pulsed Excimer Laser Irradiated 4H-SiC
  Published in: Silicon Carbide and Related Materials - 1999 (p655)