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Articles by keyword: «Megasonic»

• A Theoretical and Experimental Study of Damage-Free BEOL Cleaning with Megasonic Agitation
  Published in: Ultra Clean Processing of Silicon Surfaces VI (p151)
• Acoustic Field Analysis of a T Type Waveguide in Single Wafer Megasonic Cleaning and its Effect on Particle Removal
  Published in: Ultra Clean Processing of Semiconductor Surfaces VIII (p229)
• Behaviour of a Well-Designed Megasonic Cleaning System
  Published in: Ultra Clean Processing of Silicon Surfaces VII (p155)
• Development of a Megasonic System for Cleaning Flat Panel Display
  Published in: Ultra Clean Processing of Semiconductor Surfaces X (p181)
• Ex Situ Bubble Generation, Enhancing the Particle Removal Rate for Single Wafer Megasonic Cleaning Processes
  Published in: Ultra Clean Processing of Semiconductor Surfaces VIII (p201)
• High Efficiency Single Wafer Cleaning for Wafer Bonding-Based 3D Integration Applications
  Published in: Ultra Clean Processing of Semiconductor Surfaces X (p269)
• High Speed Imaging of 1 MHz Driven Microbubbles in Contact with a Rigid Wall
  Published in: Ultra Clean Processing of Semiconductor Surfaces IX (p7)
• Impacts of Ionization Potentials and Megasonic Dispersion
  Published in: Ultra Clean Processing of Semiconductor Surfaces IX (p19)
• Low Si Recess on Cleaning Process by Dilute HF/SC-1 with Megasonic
  Published in: Ultra Clean Processing of Semiconductor Surfaces VIII (p209)
• Megasonic Sweeping and Silicon Wafer Cleaning
  Published in: Ultra Clean Processing of Semiconductor Surfaces IX (p27)
• Non-Contact Cleaning Process for Post-CMP Copper
  Published in: Ultra Clean Processing of Silicon Surfaces VII (p291)
• Photoresist Characterization and Wet Strip after Low-k Dry Etch
  Published in: Ultra Clean Processing of Semiconductor Surfaces VIII (p325)
• Strength Distribution of Megasonic Damage Events
  Published in: Ultra Clean Processing of Silicon Surfaces VII (p147)