Keyword: "Megasonic"
Papers by keyword:
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Paper Title Page

A Theoretical and Experimental Study of Damage-Free BEOL Cleaning with Megasonic Agitation

Authors: Jeffrey M. Lauerhaas, Yi Wu, Mario Bran, Brian Fraser, Eric Brause, Tom Nicolosi

151

Acoustic Field Analysis of a T Type Waveguide in Single Wafer Megasonic Cleaning and its Effect on Particle Removal

Authors: Yang Lae Lee, Eui Su Lim, Kook Jin Kang, Hyun Se Kim, Tae Gon Kim, Sang Ho Lee, Jin Goo Park

229

Behaviour of a Well-Designed Megasonic Cleaning System

Authors: Alexander Lippert, P. Engesser, Garry Ferrell, J. Klitzke, Martin Köffler, Franz Kumnig, Jörg Leberzammer, Alexander Pfeuffer, Rainer Obweger, Harry Sax, Harald Okorn-Schmidt

155

Development of a Megasonic System for Cleaning Flat Panel Display

Authors: Hyun Se Kim, Yang Lae Lee, Eui Su Lim, Menachem Elimelech

181

Development of a Near-Field Megasonic Cleaning System for Nano-Particle Removal

Authors: Hyun Se Kim, Yang Lae Lee, Eui Su Lim

205

Direct vs. Indirect Megasonic Tank Cleaning Systems; Uniformity, Cleaning Efficiency and Cost of Ownership

Authors: J. Desagher, D. Dussault, M. Beck, R. Lillard, Eric Liebscher

201

Evaluation of Very Dilute Alkaline Solutions for Wafer Cleaning with Megasonic Irradiation

Authors: Ji Hyun Jeong, Bong Kyun Kang, Min Su Kim, Hong Seong Sohn, Ahmed A. Busnaina, Jin Goo Park

181

Ex Situ Bubble Generation, Enhancing the Particle Removal Rate for Single Wafer Megasonic Cleaning Processes

Authors: Frank Holsteyns, Tom Janssens, Sophia Arnauts, Wouter Van der Putte, Vincent Minsier, Johann Brunner, Joachim Straka, Paul W. Mertens

201

High Efficiency Single Wafer Cleaning for Wafer Bonding-Based 3D Integration Applications

Authors: D. Dussault, F. Fournel, V. Dragoi

269

High Speed Imaging of 1 MHz Driven Microbubbles in Contact with a Rigid Wall

Authors: Aaldert Zijlstra, Tom Janssens, Kurt Wostyn, Michel Versluis, Paul W. Mertens, Detlef Lohse

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